PakCat catalogue record Mems moems packaging By Gilleo, Ken Bibliographic details ISBN0071455566 PublisherMCGRAW HILL Publication placeUSA Publication year2005 LanguageEnglish Material typeBook Physical descriptionXIII, 220P SubjectsMICROELECTRONIC PACKAGING. MICROELECTROMECHANICAL SYSTEMS.OPTOELECTRONIC DEVICES.MEMS.MOEMS