PakCat catalogue record

Mems and microsystems

design and manufacture

By Hsu, Tai-Ran

Bibliographic details

ISBN: 0072393912
Publisher: McGraw-Hill
Publication place: Boston
Publication year: 2002
Edition: International ed.
Material type: Book
Physical description: xii, 436 p.

Subjects

Microelectronics., Microelectromechanical systems., Microelectronic packaging.