PakCat catalogue record MEMS applications By edited by Mohamed Gad-el-Hak Bibliographic details ISBN0849391393 PublisherCRC Press/Taylor & Francis Publication placeNew York Publication year2006 Edition2nd ed. LanguageEnglish Material typeBook Physical description1 v. (various pagings) Additional authorsHak, Gad Mohamed SubjectsMICROELECTROMECHANICAL SYSTEMS.DETECTORS.MICROACTUATORS.ROBOTS