Bibliographic details
- ISBN
- 3527309780
- Publisher
- Wiley-VCH
- Publication place
- Weinheim
- Publication year
- 2004
- Material type
- Book
- Physical description
- xxiv, 327 p.
Additional authors
Fecht, Hans-Jorg.
Werner, Matthias
Subjects
Microtechnology., Nanotechnology.