PakCat catalogue record

10 years of teaching and research, 5 years of clean room operation

report 1991-2001

By S. Büttgenbach (editor)

Bibliographic details

ISBN
3832202838
Publisher
Shaker
Publication place
Aachen
Publication year
2002
Language
English
Material type
Book
Physical description
97 p.

Additional authors

Büttgenbach, S.

Subjects

Microelectronics, Clean rooms.

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