Bibliographic details
- ISBN
- 9780387765341
- Publisher
- Springer US
- Publication place
- Boston, MA
- Publication year
- 2008
- Material type
- Book
Additional authors
Gutmann, Ronald J.
Reif, L. Rafael.
SpringerLink (Online service)
Subjects
Electronics and Microelectronics, Instrumentation., Electronics., Engineering, general., Engineering., Optical and Electronic Materials., Optical materials., Surfaces (Physics)., Surfaces and Interfaces, Thin Films., Telecommunications engineering - (E-BOOK), Wafer Level 3-D ICs Process Technology (E-BOOK)