PakCat catalogue record Plasma nanoscience basic concepts and applications of deterministic nanofabrication17/01/2019 12:41 By Ostrikov, Kostya Bibliographic details ISBN9783527407408 PublisherWliey-VCH verlag gmbh &co.KGaa Publication placeIndiaCD33505 Publication year2018 LanguageEnglish Material typeBook Physical descriptionxxv Subjectselectrical Engineering