PakCat catalogue record

Vacuum Science & Technology

materials, processing, measurement, & phenomena : JVST B.

By Khan Wakil

Bibliographic details

Additional authors

American Vacuum Society. American Institute of Physics.

Subjects

Nanotechnology, Microelectronics, Nanoelectronics, Nanotechnologie, Nanoélectronique, Microélectronique, Nanoelectronics., Microelectronics., Nanotechnology.