PakCat catalogue record

Plasma Electronics

Applications in Microelectronic Device Fabrication

By Makabe, Toshiaki

Bibliographic details

Publisher: Taylor Francis
Publication place: New York
Publication year: 2006
Material type: Book

Subjects

Magnetically Enhanced Plasma; Numerical Procedure of ModelingPlasma Engineering

Participating catalogues

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National Science Reference LibraryIslamabad, Federal
The Library of Usman Institute of Technology (UITU)Karachi, Sindh

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