Microelectromechanical systems.

An introduction to microelectromechanical systems engineering Maluf, Nadim 2004 BioNanoFluidic MEMS Peter J. Hesketh, editor 2008 Control technologies for emerging micro and nanoscale systems Evangelos Eleftheriou and S.O. Reza Moheimani (eds.) 2011 Design and manufacturing of active microsystems Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, editors 2011 Design of electrostatic vibration to electric energy conversion Nazar Sardar 2007 Electromechanical systems in microtechnology and mechatronics Arno Lenk ... [et al.] 2011 Electromechanics and MEMS Jones, T. B. 2016 Fabrication and design of resonant microdevices Bahreyni, Behraad 2008 Fundamentals and applications of microfluidics Nguyen, Nam-Trung 2006 Introduction to microfabrication Franssila, Sami 2004 Mechatronics and control of electromechanical systems Lyshevski, Sergey Edward 2017 Mechatronics and control of electromechanical systems Lyshevski, Sergey Edward Year not listed MEMS: applications Mohamed Gad-el-Hak 2006 MEMS: design and fabrication Mohamed Gad-el-Hak 2006 MEMS: introduction and fundamentals edited by Mohamed Gad-El-Hak 2006 MEMS and Microstructures in aerospace applications Osiander, Robert 2006 Mems and microsystems Hsu, Tai-Ran 2002 MEMS and MOEMS technology and applications edited by P. Rai-Choudhury 2000 MEMS linear and nonlinear statics and dynamics Younis, Mohammad I. 2010 MEMS materials and processes handbook Reza Ghodssi, Pinyen Lin, editors 2011