Microelectromechanical systems.

MEMS materials and processes handbook Reza Ghodssi, Pinyen Lin, editors 2011 MEMS mechanical sensors Stephen Beeby ... [et al.] 2004 MEMS vibratory gyroscopes Acar, Cenk 2008 MEMS/MOEMS packaging Gilleo, Ken 2005 Micro and smart systems Ananthasuresh, G. K. 2012 Micro electro mechanical system design Allen, James J. 2005 Microelectromechanical systems (MEMS) Bhattacharya, Dilip Kumar 2015 Microfabrication and nanomanufacturing edited by Mark J. Jackson 2006 Micromechatronics Giurgiutiu, Victor 2009 Microrobotics for micromanipulation Shcholkin K. I 2010 Microsystem design Senturia, Stephen D. 2001 Microsystems dynamics Ostasevicius, Vytautas 2011 Microsystems technology edited by Jumana Boussey 2003 Modeling MEMS and NEMS Pelesko, John A. 2003 Nano and micro electromechanical systems Lyshevski, Sergey Edward 2005 Nano-and micro-electromechanical systems: fundamentals of nano- and microengineering Lyshevski, Sergey Edward 2005 Neural networks and micromechanics Kussulʹ, Ė. M. 2010 Numerical simulation of mechatronic sensors and actuators Kaltenbacher, Manfred 2004 RF MEMS Rebeiz, Gabriel M. 2003 Spintronic materials and technology [edited by] Y.B. Xu, S.M. Thompson 2007